A Fully Integrated Humidity Sensor System-on-Chip Fabricated by Micro-Stamping Technology
نویسندگان
چکیده
منابع مشابه
A Fully Integrated Humidity Sensor System-on-Chip Fabricated by Micro-Stamping Technology
A fully integrated humidity sensor chip was designed, implemented, and tested. Utilizing the micro-stamping technology, the pseudo-3D sensor system-on-chip (SSoC) architecture can be implemented by stacking sensing materials directly on the top of a CMOS-fabricated chip. The fabricated sensor system-on-chip (2.28 mm × 2.48 mm) integrated a humidity sensor, an interface circuit, a digital contro...
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ژورنال
عنوان ژورنال: Sensors
سال: 2012
ISSN: 1424-8220
DOI: 10.3390/s120911592